The CMU MEMS Laboratory is developing miniature sensor and actuator
systems made using batch-fabrication processes, especially
integrated-circuit fabrication processes. This lab. is associated
jointly with the Department of
Electrical and Computer Engineering
(ECE) http://www.ece.cmu.edu/
the Robotics Institutehttp://www.ri.cmu.edu/
part of the School of Computer Sciencehttp://www.cs.cmu.edu/ and the
Institute for Complex Engineered
Systems (ICES) http://www.ices.cmu.edu at Carnegie Mellon Universityhttp://www.cmu.edu/
