The Microfabrication Laboratory (MFL) supports graduate and undergraduate education by providing access to microfabrication technology. The laboratory conducts microfabrication-related research, primarily in the area of microelectromechanical systems (MEMS). In MEMS, the laboratory's areas of expertise include surface micromachining, with an emphasis on metal surface micromachining using the Northeastern University MEtal Micromachining (NUMEM) process and bulk micromachining including anisotropic etching and alloy bonding.
