The Microsensor & Actuator Technology Berlin (MAT) is part of the
research unit "Microperipheric Technologies" of the
Technical University of Berlin
http://www.tu-berlin.de and
was founded in 1987.
Prof. Dr.-Ing. E. Obermeier
http://www-mat.ee.tu-berlin.de/staff/e_obermeier.html
is the head of the MAT. Today more than 30 research
scientists http://www-mat.ee.tu-berlin.de/staff/personen.html
are working on the field of sensor and actuator
development. Main topics are the development and realization of
sensors for measurement of pressure, force, acceleration, temperature,
humidity, gas flow and gas concentration. Modern computer aided design
methods like FEA
http://www-mat.ee.tu-berlin.de/service/simulation.html
are used to optimize the sensor characteristic.
The cleanroom facilities
http://www-mat.ee.tu-berlin.de/service/simulation.html
include standard CMOS processes and numerous special
processes, e.g. anisotropic etching, electrochemical etching and anodic bonding. Computer controlled test
systems are used to characterize the devices.
