A database of mechanical properties of polycrystalline silicon.
Also a collection of references for papers written since 1980 that
report the mechanical properties of polycrystalline silicon is now
available on the The Berkeley
Sensor and Acuator Center
http://bsac.eecs.berkeley.edu
web site. There is also a collection of
papers that report devices made by surface micromachined
polycrystalline silicon.
