ACML is a research team at the University of Minnesota
specializing in MEMS sensor design and fabrication. We are trying to
develop new sensing principles by using control theory as an enabling
technology. Our expertise lies in the area of applying advanced control
algorithms on in-house fabricated MEMS devices. Some of the completed
and ongoing projects include MEMS 2D electrostatic actuators that can be
actuated inside the pull-in range by applying nonlinear controls, a MEMS
absolute angle measurement sensor design, fabrication and
implementation, wireless MEMS acoustic sensors and MEMS sensor SAW
device integration for wireless sensors.
