The Liu Research (MASS) group at the University of Illinois at Urbana-Champaign performs groundbreaking research in all aspects of the emerging technology of Microelectromechanical Systems (MEMS). This includes microfluidics, bioMEMS, optical MEMS, polymer MEMS, photonics, nanolithography, RF MEMS, CAD, simulation, advanced sensors, and basic fabrication. We take designs from "substrates to systems" and perform all fabrication locally at the UIUC Micro and Nanotechnology Laboratory. The group is organized under the Department of Electrical and Computer Engineering and headed by Dr. Chang Liu.
