Nano-Master, Inc. manufactures PECVD systems for deposition of SiO2, Si3N4, DLC and CNT; PE-MOCVD Systems for GaN growth; Sputtering Systems (reactive, co-sputtering, combinatorial); Thermal and E-Beam Evaporators, Ion Beam and Reactive Etching Systems; Atomic Layer Deposition Tools; Megasonic Wafer/Mask Cleaners.
