Primaxx is the world leader in reduced pressure, residue-free MEMS dry etch release, a critical buried oxide etch step which "releases" the moving components of challenging MEMS device designs. The "dry" Primaxx process also eliminates stiction, a yield-killing phenomenon which can bind the moving components of MEMS devices when released with conventional wet processing technology. Primaxx, Inc. designs, manufactures, and markets processing equipment for MEMS and semiconductors, and offers the broadest range of MEMS dry etch release products, from lab systems to multi-chambered cluster tools for high volume production.
