Manufacturer of cassette-to-cassette cluster and single/batch loadlocked
plasma etch and deposition systems, that can be configured with ICP, RIE,
XeF2 and PECVD sources. Products include the market-leading ASE® deep
silicon etch process for MEMS/MOEMS micromachining. STS offers worldwide
customer support through a network of international service centres and
agents.
