The purpose of this project is to establish a statewide fabrication,
design, and testing infrastructure capability for the new and growing field of
microelectromechanical systems (MEMS). MEMS devices are emerging as product
performance differentiators in both commercial and defense markets such as
automotive, aerospace, medical, industrial process control, electronic
instrumentation, office equipment, appliances, and telecommunications.
Integrated circuit technology (IC) has brought unprecedented computational
power ever closer to the point of use. MEMS enables the development of smart
products by providing the required interface between the available
computational power and the physical world through the perception and control
capabilities of sensors and actuators.
