Metastable film,thickness=300nm,deposited by ion beam sputtering(IBS) method on a quartz stripes with good flatness,values determined by X-ray diffraction method and W-A model,Cu=78%,Mo=22%.
Thin Solid Films,275(1996), p.26
Coherently diffracting domains,CDD
1.5 .. 1.7 nm
Metastable film,300 nm thickness=300nm, deposited by ion beam sputtering(IBS) method,on a quartz stripes with good flatness,values determined by X-ray diffraction method and W-A model,Cu=64%,Mo=36%.
Thin Solid Films 275(1996), p.26
Coherently diffracting domains,CDD
2.1 .. 2.3 nm
Metastable film,thickness=300nm,deposited by ion beam sputtering(IBS) method, on a quartz stripes with good flatness,values determined by X-ray diffraction method and W-A model,Cu=50%,Mo=50%.
Thin Solid Films 275(1996), p.26
Micro-strains
0.002 .. 0.004
Metastable film,thickness=300nm,deposited by ion beam sputtering(IBS) method on a quartz stripes with good flatness,values determined by X-ray diffraction method and W-A model,Cu=78%,Mo=22%.
Thin Solid Films,275(1996), p.26
Micro-strains
0.018 .. 0.02
Metastable film,300 nm thickness=300nm, deposited by ion beam sputtering(IBS) method,on a quartz stripes with good flatness,values determined by X-ray diffraction method and W-A model,Cu=64%,Mo=36%.
Thin Solid Films 275(1996), p.26
Micro-strains
0.005 .. 0.007
Metastable film,thickness=300nm,deposited by ion beam sputtering(IBS) method, on a quartz stripes with good flatness,values determined by X-ray diffraction method and W-A model,Cu=50%,Mo=50%.
Thin Solid Films 275(1996), p.26
Stress,in-plane
-4.7 .. -4.3 GPa
Thickness=300nm,deposited by ion beam assisted deposition method on a quartz stripes with good flatness, values are average and are determined by Dolle formalism and the rotational definition of strains for linear combination of pure Cu & Mo .
Thin Solid Films,275(1996), p.26
Stress,shear
-340 .. -240 MPa
Thickness=300nm,deposited by ion beam assisted deposition method on a quartz stripes with good flatness, values are average and are determined by Dolle formalism and the rotational definition of strains for linear combination of pure Cu & Mo .
Thin Solid Films,275(1996), p.26
Stress-free lattice parameter
0.3112 .. 0.3116 nm
Thickness=300nm,deposited by ion beam assisted deposition method on a quartz stripes with good flatness, values are average and are determined by Dolle formalism and the rotational definition of strains for linear combination of pure Cu & Mo .