Thickness of 0.7-2.1 um,deposited on silicon<111>single crystal or quartz glass substrates,values obtained using short laser pulses to excite a surface acoustic wave(SAW) pulse,SAW wave number=0.18.
Applied Surface Science,86(1995), p.595
Poisson's Ratio
0.25 .. 0.45
Thickness of 0.7-2.1 um,deposited on silicon<111>single crystal or quartz glass substrates,values obtained using short laser pulses to excite a surface acoustic wave(SAW) pulse,SAW wave number=0.18.
Applied Surface Science,86(1995), p.595
Young's Modulus
3 .. 5 GPa
Thickness of 0.7-2.1 um,deposited on silicon<111>single crystal or quartz glass substrates,values obtained using short laser pulses to excite a surface acoustic wave(SAW) pulse,SAW wave number=0.18.