Material: Glass7059, film

To purchase MEMS-related materials, supplies, equipment, wafers, etc.,please visit the links section of the MEMSNet site.

Property↑↓	Value↑↓	Conditions↑↓	Reference↑↓
Density	2250 kg/m^3	Corning borosilicate glass,sputtered film,thickness=0.42um, values are calculated using electrostatically deflectable membranes and Cr for metallization(thickness of 0.005um),assuming density of 7200kg/m/m/m & Young's Modulus of 180 GPa for Cr films.	IEEE Transactions on electron devices,Vol.ED25,No.10,Oct1978, p.1249
Young's Modulus	41.6 .. 62.4 GPa	Corning borosilicate glass,sputtered film,thickness=0.42um, values are calculated using electrostatically deflectable membranes and Cr for metallization(thickness of 0.005um),assuming density of 7200kg/m/m/m & Young's Modulus of 180 GPa for Cr films.	IEEE Transactions on electron devices,Vol.ED25,No.10,Oct1978, p.1249