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Material: Molybdenum (Mo), film

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Property↑↓Value↑↓Conditions↑↓Reference↑↓
Coefficient of static friction0.3Used as a mover,min voltage to move the mover=1600 V, bottom of the mover is glass plate,film condition:0.2174 um & deposited by vacuum-evaporation method on glass substrate.IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991, Nara,Japan, p.151
Coefficient of static friction0.44Used as a mover,min voltage to move the mover=1700 V,bottom of the mover is Silicon substrate,film condition:0.2174 um deposited by vacuum-evaporation method on glass substrate.IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991, Nara,Japan, p.151
Static frictional force(max)0.001041 NUsed as a mover,min voltage to move the mover=1600 V, bottom of the mover is glass plate,film condition:0.2174 um & deposited by vacuum-evaporation method on glass substrate.IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991, Nara,Japan, p.151
Static frictional force(max)0.001175 NUsed as a mover,min voltage to move the mover=1700 V,bottom of the mover is Silicon substrate,film condition:0.2174 um deposited by vacuum-evaporation method on glass substrate.IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991, Nara,Japan, p.151
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