Material: Polyimide, film

To purchase MEMS-related materials, supplies, equipment, wafers, etc.,please visit the links section of the MEMSNet site.

Property↑↓	Value↑↓	Conditions↑↓	Reference↑↓
Poisson's Ratio	0.35	In-plane properties,values provided by Auman(1995) for a PMDA/BPDA/TFMOB polyimide.	Mechanics of Materials 23(1996), p.314
Poisson's Ratio	0.1 .. 0.45	Out-of-plane properties,ranges are considered to study the effects of properties on the stress field in a cell which is composed of a square copper via in a thin polyimide film mounted on top of a silicon substrate	Mechanics of Materials,23(1996), p.314
Residual stress/Young's Modulus	0.01 .. 0.012	In situ measurement of thin films under residual tensile stress deposited and patterned on a silicon<100> substrate in which 5um thick diaphragms have been fabricated, T shape structure,data agrees with cantilever beams with a Nominal length of 145-640 um.	J.Appl.Phys.62(9),Nov 1987, p.3584
Shear Modulus	1 .. 10 GPa	Out-of-plane properties,ranges are considered to study the effects of properties on the stress field in a cell which is composed of a square copper via in a thin polyimide film mounted on top of a silicon substrate	Mechanics of Materials,23(1996), p.314
Young's Modulus	7.5 GPa	In-plane properties,values provided by Auman(1995) for a PMDA/BPDA/TFMOB polyimide.	Mechanics of Materials 23(1996), p.314
Young's Modulus	8 .. 15 GPa	Out-of-plane properties,ranges are considered to study the effects of properties on the stress field in a cell which is composed of a square copper via in a thin polyimide film mounted on top of a silicon substrate	Mechanics of Materials,23(1996), p.314