Material: Polysilicon, bulk

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Property↑↓	Value↑↓	Conditions↑↓	Reference↑↓
Friction coefficient	0.04	At the begining of scratching & from an abrupt increase in friction during scratching, width of scratch(1.75 um) at about 17-20 mN normal load(measured from SEM images),critical load=9 mN.	J.Mater.Res,Vol.12,No.1,Jan 1997, p.59
Friction coefficient	0.35	At the end of scratching & from an abrupt increase in friction during scratching, width of scratch(1.75 um) at about 17-20 mN normal load(measured from SEM images),critical load=9 mN.	J.Mater.Res,Vol.12,No.1,Jan 1997, p.59
Friction coefficient(final)	0.35	Values obtained during scratching, critical load=9 mN,width of scratch(by SEM observations)=1.75um	J.Mater.Res.,Vol.12,No.1,Jan1997, p.59
Friction coefficient(initial)	0.04	Values obtained during scratching, critical load=9 mN,width of scratch(by SEM observations)=1.75um	J.Mater.Res.,Vol.12,No.1,Jan1997, p.59
Friction coefficient,final	0.06	Sliding against a spherical diamond tip (radius=20um)at 10 mN normal load, 7.0 mmstroke length,0.1 Hz frequency,and 1.0 mm/sec average linear speed for a sliding distance of 4m under an ambient temperature of about 22+-1 C and a relative humidity of about 45+-5% RH.	J.Mater.Res,Vol.12,No.1,Jan 1997, p.60
Friction coefficient,final	0.46	Sliding against a single-crystal sapphire ball(diameter=3mm) at 10 mN normal load,7.0 mmstroke length,0.1 Hz frequency,and 1.0 mm/sec average linear speed for a sliding distance of 4m under an ambient temperature of about 22+-1 C and a relative humidity of about 45+-5% RH.	J.Mater.Res,Vol.12,No.1,Jan 1997, p.60
Friction coefficient,initial	0.06	Sliding against a spherical diamond tip (tip radius, 20 um) at 10 mN normal load, 7.0 mm stroke length, 0.1 Hz frequency, and 1.0 mm/sec average linear speed for a sliding distance of 4 m under an ambient temperature of 22 +-1 deg C and a relative humidity of about 45 +-5% RH.	J.Mater.Res,Vol.12,No.1,Jan 1997, p.60
Friction coefficient,initial	0.3	Sliding against a single-crystal sapphire ball(diameter,3mm) at 10 mN normal load,7.0 mmstroke length,0.1 Hz frequency,and 1.0 mm/sec average linear speed for a sliding distance of 4m under an ambient temperature of about 22+-1 C and a relative humidity of about 45+-5% RH.	J.Mater.Res,Vol.12,No.1,Jan 1997, p.60
Hardness	12.6 GPa	Values obtained by nanodentation at a load of 15 mN and indentation depth of 265 nm at peak load.	J.mater.Res,Vol. 12,No.1,Jan1997, p.59
Hardness	12.8 GPa	Values obtained by nanodentation at a load of 0.2 mN with indentation depth at peak load 24 nm.	J.mater.Res,Vol. 12,No.1,Jan1997, p.59
Roughness(Rms)	0.18 nm	Value measured using AFM at a scan size of 1 um x 1 um.	J. Mater. Res., Vol. 12 No. 1, Jan 1997, p.60
Young's Modulus	203 GPa	Values obtained by nanodentation at a load of 0.2 mN with indentation depth at peak load 24 nm.	J.mater.Res,Vol. 12,No.1,Jan1997, p.59
Young's Modulus	181 GPa	Values obtained by nanodentation at a load of 15 mN and indentation depth of 265 nm at peak load.	J.mater.Res,Vol. 12,No.1,Jan1997, p.59