A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here

Material: Silicon (Si), film

To purchase MEMS-related materials, supplies, equipment, wafers, etc.,please visit the links section of the MEMSNet site.

Property↑↓Value↑↓Conditions↑↓Reference↑↓
Coefficient of static friction0.12Used as a mover,min voltage to move the mover=1000 V, bottom of the mover is glass plate,film condition:0.273 um & deposited by vacuum-evaporation method on glass substrate.IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991, Nara,Japan, p.151
Coefficient of static friction0.3Used as a mover,min voltage to move the mover=1400 V,bottom of the mover is Silicon substrate,film condition:1.4698 um deposited by vacuum-evaporation method on glass substrate.IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991, Nara,Japan, p.151
Coefficient of static friction0.3Used as a mover,min voltage to move the mover=1400 V,bottom of the mover is Silicon substrate,film condition:0.273 um deposited by vacuum-evaporation method on glass substrate.IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991, Nara,Japan, p.151
Static frictional force(max)0.000407 NUsed as a mover,min voltage to move the mover=1000 V, bottom of the mover is glass plate,film condition:0.273 um & deposited by vacuum-evaporation method on glass substrate.IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991, Nara,Japan, p.151
Static frictional force(max)0.000797 NUsed as a mover,min voltage to move the mover=1400 V,bottom of the mover is Silicon substrate,film condition:1.4698 um deposited by vacuum-evaporation method on glass substrate.IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991, Nara,Japan, p.151
Static frictional force(max)0.000797 NUsed as a mover,min voltage to move the mover=1400 V,bottom of the mover is Silicon substrate,film condition:0.273 um deposited by vacuum-evaporation method on glass substrate.IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991, Nara,Japan, p.151
Terms of Use | Contact Us | Search