Can anyone give me a suggestion on where I can get a PECVD nitride done on some
4" device wafers which have patterned aluminum. The nitride is to be used as a
protective layer during an extended KOH etch.

Thanks,

Kevin Walsh

Dr. Kevin M. Walsh
Electrical Engineering Department, Speed Scientific School
University of Louisville, Louisville, KY 40292
(502) 852-0826
Internet address: [email protected]