I tried sputtering gold directly onto a pyrex wafer in a DC magnetron
sputter tool.  Adhesion was terrible, it came right off.  Adding a
Chromium adhesion layer below the gold was necessary.  500 Angstroms
of Cr under 5000 Angstroms of Au in the DC sputterer worked well.

Robert D. White
Graduate Student Research Assistant
Solid State Electronics Lab
Mechanical Engineering
University of Michigan
Ann Arbor, MI 48109

(734)936-3824
[email protected]

>  From: sokwon Paik [mailto:[email protected]]
>  Sent: Tuesday, April 22, 2003 12:37 PM
>  To: [email protected]
>  Subject: [mems-talk] Is there any way I can deposit gold onto pyrex
>  wafer directly?
>
>  I'm a student of Texas A&M University.
>  As far as I know, gold doesn't attach to pyrex glass
>  directly. But I think if I use sputtering machine then
>  it might be possible.
>  Anybody tried to attach gold directly onto pyrex
>  wafer?
>  One more question. Is there platinum sputtering source
>  exist?
>  If so, how much is it? Please answer me the question.
>  I appreciate your any reply.
>  Thanks,
>
>  sokwon Paik
>