Hi All,

I am spinning a thick photoresist (novolac-type): around 60um. The bake is
done at 90C for 40min.
After exposure (typically 1680mJ/cm2), we are seeing mouse bites on the
photoresist near the exposed area.

I've tried to reduce the exposure time but without success.

As anyone experienced this as well? would anyone know how to get rid of
these mouse bites?

Thanks a lot in advance

Magali Brunet

--
Energy Processing for ICT
NMRC, Lee Maltings, Cork, Ireland

Tel: +353 (0)21 4 904279
Fax: +353 (0)21 4 270271