Transene Company offers a variety of etchants for LTO and other
materials, particularly in the PSE family of products.  Our etchants may
be viewed at www.transene.com by choosing Catalogs and the Etchants menu
option.

Christopher Christuk
Transene Company
Tel:  978 777 7860
Email:  [email protected]

-----Original Message-----
From: David Nemeth [mailto:[email protected]]
Sent: Wednesday, April 23, 2003 5:52 PM
To: General MEMS discussion
Subject: RE: [mems-talk] off-axis wafer etching

I believe that the <100> plane is a local minimum in etching speed, so
that
the <100> plane would eventually get revealed.  This is why you can get
smooth bottoms on an anistropically etched pit.

David Nemeth
Senior Engineer
Sophia Wireless, Inc.


-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of li zhiping
Sent: Tuesday, April 22, 2003 9:27 PM
To: [email protected]
Subject: [mems-talk] off-axis wafer etching


Hi,
I want to ask a question. If I make a protecting pattern, say by LTO,on
a
weird wafer surface, which has a 9 degree to <100>, and put it in KOH or
TMAH for tens minutes, Could the wafer be etched to the <100> at the
unprotected area? Thanks!
Zhiping





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