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MEMSnet Home: MEMS-Talk: Silicon Etch Rates for Various Etchants
Silicon Etch Rates for Various Etchants
2003-04-26
preston
2003-04-28
nga
2003-04-28
Andreas Jahn
2003-04-28
Kirt & Erika Zipf-Williams
2003-04-28
[email protected]
Silicon Etch Rates for Various Etchants
preston
2003-04-26
Hi,
Does anyone know a good source (book, review article, etc.) for the
silicon etch anisotropies (Si(111) versus Si(100)) and oxide etch
selectivities of KOH, EDP, TMAH, Hydrazine, and related etchants?
Thanks in advance,

Preston Larson


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