Dear all,

I have with me SU-8 2002. I would like to know if I can do multiple coating
on silicon wafer in order to get a thicker film. If I can do multiple
coating, what will be the requirements for the softbake, exposure, PEB and
develop processes?

best regards,
Abang Annuar Ehsan
Jabatan Kejuruteraan Elektrik, Elektronik & Sistem
Fakulti Kejuruteraan
Universiti Kebangsaan Malaysia
43600 Bangi, Selangor, MALAYSIA