Hi Preston,

for TMAH check this paper out: "Dual-doped TMAH silicon etchant for
microelectromechanical structures and systems application".

-Andreas

-----Original Message-----
From: preston [mailto:[email protected]]
Sent: Saturday, April 26, 2003 12:43 PM
To: [email protected]
Subject: [mems-talk] Silicon Etch Rates for Various Etchants


Hi,
Does anyone know a good source (book, review article, etc.) for the
silicon etch anisotropies (Si(111) versus Si(100)) and oxide etch
selectivities of KOH, EDP, TMAH, Hydrazine, and related etchants?
Thanks in advance,

Preston Larson