See the book Properties of Crystalline Silicon (a thick yellow book), edited
by Robert Hull, published by IEE/INSPEC in 1999.
Chapter 16, entitled "Etching of Single-Crystal Silicon,"
has a large review with etch rates for different solutions (including those
below), crystal directions, etc., with references.
        --Kirt Williams, Ph.D.   consultant

----- Original Message -----
From: preston 
To: 
Sent: Saturday, April 26, 2003 9:42 AM
Subject: [mems-talk] Silicon Etch Rates for Various Etchants


> Hi,
> Does anyone know a good source (book, review article, etc.) for the
> silicon etch anisotropies (Si(111) versus Si(100)) and oxide etch
> selectivities of KOH, EDP, TMAH, Hydrazine, and related etchants?
> Thanks in advance,
>
> Preston Larson
>
>
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