An alternative is to place the dice on a Gel-Pak insert for etching.
The dice stick pretty well in HF.
--Kirt Williams, Ph.D. consultant
----- Original Message -----
From: Robert Dean
To: General MEMS discussion
Sent: Monday, April 28, 2003 5:36 PM
Subject: [mems-talk] tooling for HF release etch
>
> >Hello,
>
> I am looking for a ladle-like tool or small "bucket" for transferring die
> to and from, and to hold them in a beaker of HF for a standard SOI MEMS
> process release etch. Any suggestions on what and where to purchase it?
>
> Sincerely,
>
> Robert Dean
>
>
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