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MEMSnet Home: MEMS-Talk: tooling for HF release etch
Contact angle between water and silicon or silica
2003-04-24
Danny Klein
2003-04-25
Gautham V
2003-04-24
Bill Moffat
2003-04-24
Phillipe Tabada
tooling for HF release etch
2003-04-29
Robert Dean
2003-04-29
Mighty Platypus
2003-04-29
Kirt & Erika Zipf-Williams
tooling for HF release etch
Kirt & Erika Zipf-Williams
2003-04-29
An alternative is to place the dice on a Gel-Pak insert for etching.
The dice stick pretty well in HF.
    --Kirt Williams, Ph.D.   consultant

----- Original Message -----
From: Robert Dean 
To: General MEMS discussion 
Sent: Monday, April 28, 2003 5:36 PM
Subject: [mems-talk] tooling for HF release etch


>
> >Hello,
>
> I am looking for a ladle-like tool or small "bucket" for transferring die
> to and from, and to hold them in a beaker of HF for a standard SOI MEMS
> process release etch.  Any suggestions on what and where to purchase it?
>
> Sincerely,
>
> Robert Dean
>
>
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