Magali,

Another option you want to try is a vaccum softbake.
I have used this techninque in the past on some thick
resist.

avi


From: Magali Brunet 
To: 
Sent: Thursday, April 24, 2003 9:50 AM
Subject: [mems-talk] mouse bites in photoresist


> Hi All,
>
> I am spinning a thick photoresist (novolac-type): around 60um. The bake
is
> done at 90C for 40min.
> After exposure (typically 1680mJ/cm2), we are seeing mouse bites on the
> photoresist near the exposed area.
>
> I've tried to reduce the exposure time but without success.
>
> As anyone experienced this as well? would anyone know how to get rid of
> these mouse bites?
>
> Thanks a lot in advance
>
> Magali Brunet

Avi Laker
Teccor Electronics
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