Hello,
Does anyone know the recipe of Au etchant or the product name for Au
etchant? I have Au/Cr deposited pyrex glass wafer. now I don't have Au
etchant. Au etchant should not attack Cr layer or interface of Cr/glass
since Au/Cr would be window for glass isotropic etching in BOE.
thanks,
SangHwui Lee
Ph.D candidate/MSE/NJIT
Microelectronics Research Center(MRC)
973-596-6368(O)
201-242-1486(H)
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