Transene makes one called TFA that is pretty good. It takes less than 20
seconds for it to etch 1000A of Au, and I had no problems with it.

Jesse Fowler
  UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV
  Los Angeles, CA 90095-1597 | (310)825-3977
"Observations of nature, no matter how seemingly arcane, are like
peeling off one more layer from the great onion of knowledge"
    -- Don Petit, ISS science officer

On Wed, 30 Apr 2003, Sang Hwui Lee wrote:

> Hello,
>
> Does anyone know the recipe of Au etchant or the product name for Au
> etchant? I have Au/Cr deposited pyrex glass wafer. now I don't have Au
> etchant. Au etchant should not attack Cr layer or interface of Cr/glass
> since Au/Cr would be window for glass isotropic etching in BOE.
>
> thanks,
>
> SangHwui Lee
> Ph.D candidate/MSE/NJIT
> Microelectronics Research Center(MRC)
> 973-596-6368(O)
> 201-242-1486(H)
>
>
>
>
>
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