There are commercially available potassium iodide solutions that are sold as
gold etchant. They work well on pure gold. Unfortunately I can't advise on
its effects on chromium since I have no experience.


Gabriel Rojano
Staff Reliability Engineer
M/A-COM, a Tyco Electronics Company
[email protected]
ph: (978) 442 5163
Fax (978) 442 4787
1011 Pawtucket Blvd, MS G31
Lowell, MA 01854


> -----Original Message-----
> From: Sang Hwui Lee [SMTP:[email protected]]
> Sent: Wednesday, April 30, 2003 11:47 AM
> To:   [email protected]
> Subject:      [mems-talk] Au etchant
>
> Hello,
>
> Does anyone know the recipe of Au etchant or the product name for Au
> etchant? I have Au/Cr deposited pyrex glass wafer. now I don't have Au
> etchant. Au etchant should not attack Cr layer or interface of Cr/glass
> since Au/Cr would be window for glass isotropic etching in BOE.
>
> thanks,
>
> SangHwui Lee
> Ph.D candidate/MSE/NJIT
> Microelectronics Research Center(MRC)
> 973-596-6368(O)
> 201-242-1486(H)
>
>
>
>
>
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