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MEMSnet Home: MEMS-Talk: Re: process resistant insulator
Re: process resistant insulator
2003-05-01
Dave Kharas
Re: process resistant insulator
Dave Kharas
2003-05-01
You can try PECVD deposited amorphous H-SiC,
its resistant to both HF and organic solvents.

dave kharas Ph.D.
Sarcon Microsystems @Sarnoff Corp.
Princeton NJ

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