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MEMSnet Home: MEMS-Talk: Photoresist for Au etching
Photoresist for Au etching
2003-05-01
Sang Hwui Lee
2003-05-05
[email protected]
Photoresist for Au etching
Sang Hwui Lee
2003-05-01
Hello,
Does anyone think that I need really special photoresist such as AZ-111,
AZ-1350OH, KMER for Au etching? actually I have shipley 3813. does it matter
if I use this shipley 3813?

SangHwui Lee
Ph.D candidate/MSE/NJIT
Microelectronics Research Center(MRC)
973-596-6368(O)
201-242-1486(H)





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