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MEMSnet Home: MEMS-Talk: How to handle ultra thin wafer
How to handle ultra thin wafer
2003-05-01
Hongjun Zeng
2003-05-02
Luesebrink Helge
How to handle ultra thin wafer
Hongjun Zeng
2003-05-01
Dear colleagues,

I'm going to use some ultra thin silicon wafers (10-20um). I found meet a
basic problem----how can I handle them without making it broken. Any
suggestion would be appreciated.

Hongjun Zeng
**********************************************
Microfabrication Applications Laboratory (MAL)
University of Illinois at Chicago
ERF Building, 842 W. Taylor Street
Chicago, IL 60607-7022
Tel.: 312-413-5889, Fax: 312-996-6465
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