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MEMSnet Home: MEMS-Talk: Photoresist for Au etching
Photoresist for Au etching
2003-05-01
Sang Hwui Lee
2003-05-05
[email protected]
Photoresist for Au etching
[email protected]
2003-05-05
It shouldn't matter what photoresist you use depending on the Au etchant you are
using. I have done a lot of etching of Au using both positive and negative
working resists and the all hold up well during etch with Iodine type etch
solution. Bob Henderson

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