Try using a Focused Ion Beam (FIB).

Jon

Jon M. Hiller
Electron Microscopy Center
Argonne National Laboratory
9700 South Cass Avenue
Argonne, IL.  60439
Tel:  630-252-9558
Fax:  630-252-4289


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of B Swope
Sent: Friday, May 02, 2003 09:53
To: [email protected]
Subject: [mems-talk] Borosilicate Glass Holes

Hello,
I was wondering if anyone has any success with creating small ( <50
microns) holes in borosilicate glass.  I am currently using an ablation
laser with mixed results...Any advice or suggestions would be greatly
appreciated.
Thanks,
Brett Swope

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