One option is to use photostructurable glass ceramic material that can be UV
patterned and etched (the material is not a borosilicate but an
aluminosilicate).   We have done much work in this area with aspect ratios of
30:1 and feature sizes less than 10
microns.
henry




                      "B Swope"
                                To:      
                      Sent by:                   cc:
                      mems-talk-bounces@         Subject: [mems-talk]
Borosilicate Glass Holes
                      memsnet.org


                      05/02/2003 07:53
                      AM
                      Please respond to
                      B Swope; Please
                      respond to General
                      MEMS discussion






Hello,
I was wondering if anyone has any success with creating small ( <50 microns)
holes in borosilicate glass.  I am currently using an ablation laser with mixed
results...Any advice or suggestions would be greatly appreciated.
Thanks,
Brett Swope

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