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MEMSnet Home: MEMS-Talk: RE: Anisotropic Cu Wet etching
RE: Anisotropic Cu Wet etching
2003-05-06
HE,Han-Johnny
2003-05-07
Neal Ricks
2003-05-06
[email protected]
2003-05-07
David Nemeth
RE: Anisotropic Cu Wet etching
[email protected]
2003-05-06
The only way I know of for you to produce the desired sidewall profile is to do
a photo lift-off process. You can contact Bill Moffet at Yield Engineering
Service who contributes to this forum a lot. He is an expert in this area. They
are located in Bay area California. Bob Henderson

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