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MEMSnet Home: MEMS-Talk: Cr and Au deposition by using sputter
Cr and Au deposition by using sputter
2003-05-07
Carmen
2003-05-07
R. Brent Garber (2 parts)
2003-05-07
Rodger Cary
2003-05-07
[email protected]
2003-05-08
leonid bikov
Cr and Au deposition by using sputter
Carmen
2003-05-07
Hi all,

    I would like to know whether someone who have tried to deposit Cr
and Au by using sputter and then etched them successfully. I faced the
problem that the Cr layer cannot be etched completely after etching the
Au layer, and the color of the Cr layer is not silver, it is like green.
Is there any reason to cause the Cr layer become green if I use sputter
to deposit it? Do you have any idea for what the green layer is? (Is it
a compound or oxide).
Thank you very much.

Best Regards,
Carmen



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