Carmen,
Cr/Au sputtered layers are very common for a mask when wet etching.  Au is
easily etched in a KI / I2 mixture and your Cr should be shiny.  Is your
gold cloudy?  This would show an air leak in your system.  A commercial CR-7
etch works well to etch Cr.  I have never seen green on Cr in my 22 years of
sputtering these layers.  Are you using Ar as the sputter gas?  Are you sure
your substrate is VERY clean before sputtering?

Brent

Carmen wrote:

> Hi all,
>
>     I would like to know whether someone who have tried to deposit Cr
> and Au by using sputter and then etched them successfully. I faced the
> problem that the Cr layer cannot be etched completely after etching the
> Au layer, and the color of the Cr layer is not silver, it is like green.
> Is there any reason to cause the Cr layer become green if I use sputter
> to deposit it? Do you have any idea for what the green layer is? (Is it
> a compound or oxide).
> Thank you very much.
>
> Best Regards,
> Carmen
>
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