Hi, Carmen,
Do your wafers see temperature above 250C after sputtering?
Interdiffusion of Cr to Au at temperatures above 250C is well known
problem and this may cause the problems with etching.

Best regards,

Leonid

-----Original Message-----
From: Carmen [mailto:[email protected]]
Sent: Wednesday, May 07, 2003 4:02 PM
To: [email protected]
Subject: [mems-talk] Cr and Au deposition by using sputter


Hi all,

    I would like to know whether someone who have tried to deposit Cr
and Au by using sputter and then etched them successfully. I faced the
problem that the Cr layer cannot be etched completely after etching the
Au layer, and the color of the Cr layer is not silver, it is like green.
Is there any reason to cause the Cr layer become green if I use sputter
to deposit it? Do you have any idea for what the green layer is? (Is it
a compound or oxide). Thank you very much.

Best Regards,
Carmen



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