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MEMSnet Home: MEMS-Talk: LPCVD on 100
LPCVD on 100
2003-05-07
Jan Hoh
LPCVD on 100
Jan Hoh
2003-05-07
I am looking for 50-100 nm LPCVD nitride on 100 silicon (100-600 um
thick).  The size of the wafer and the  electrical properties do not
matter.  I just need 2-5  6" wafers (or equivalent) - not a whole run -
and was hoping someone might have some extras they do not need.  I
checked many of the surplus places with no luck.

Jan


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