A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Fabrication of MEMS Device
Fabrication of MEMS Device
2003-05-07
Amit Savkar (2 parts)
2003-05-12
Cedric SIRE
2003-05-12
Chris Sanders
2003-05-08
Stonefield, Mark
Fabrication of MEMS Device
Stonefield, Mark
2003-05-08
Amit,

MEMSCAP acquired the group that was formerly Cronos from JDS Uniphase.
We still run the original MUMPS process. We also run two new MUMPS
processes, SOI MUMPS and Metal MUMPS, along with the original Poly
MUMPS. You can access the design rules and place orders on the website:
http://www.memsrus.com/CIMSsvcs.html

If you have any questions, feel free to contact Buzz Hardy at
(919)314-2235.

-Mark Stonefield

-----Original Message-----
From: Amit Savkar [mailto:[email protected]]
Sent: Wednesday, May 07, 2003 6:57 PM
To: [email protected]
Subject: [mems-talk] Fabrication of MEMS Device

Dear All,
This is Amit Savkar a Phd Candidate at University of Connecticut at
Storrs.
I am a new member to this discussion group, and would like to ask a few
basic questions regarding fabrication of MEMS device. Our research group
is
actively seeking vendors who can actually fabricate a device, with
decent
reliability. We have particulars of this device and would like to know
vendors, universities who had reliable established MUMPS process for
fabrication.
It would be highly appreciated if any fellow members can throw light on
the
same.
Thanks
Regards
Amit Savkar

PhD Candidate
University of Connecticut
Department of Mechanical Engineering
Dynamics and Vibration Lab
191 Auditorium Road U 3139
Storrs CT 06226
Lab : 860 486 5339


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
Process Variations in Microsystems Manufacturing
MEMS Technology Review
Harrick Plasma, Inc.