Hi

Have you tried adding silicon to your TMAH solution? might make your
solution more stable,
at least it increases the selectivity.

Regards
Tobias

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of
Sriram Akella
Sent: Thursday, May 08, 2003 6:03 PM
To: [email protected]
Subject: [mems-talk] Thin Membrane etching


Hi Everyone,

   I am trying to etch 2 micron thick membrane. I am
using TMAH as the etchant, but the etchrate of TMAH
maintained at 80C is varying a lot.

 Can anyone suggest a procedure that is reproduce able
to a fairly large extent.

regards,
sriram

_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/