Here are some of the reasons:

1. Polysilicon is process-compatible and has been available for a long time.
2. Poly forms a protective oxide of limited thickness, preventing it from
"burning."
3. By using the same material (silicon) for the substrate and the actuator,
the actuator is not unintentionally acutated as the ambient temperature
changes.

    --Kirt Williams, Ph.D.    consultant

----- Original Message -----
From: HE,Han-Johnny 
To: 
Sent: Thursday, May 08, 2003 7:31 PM
Subject: [mems-talk] Materail for Thermal laternal actuator


>
> Hi, all,
>
> Just wondering why people prefer using poly-si instead of other mat.
> such as metal for typical thermal lateral actuator?
>
> Johnny
>
> ===========================================
> Johnny H.HE,  Ph.D. Candidate
> Division of Electrical Engineering, Engineering
> Department,Cambridge University,CB2 1PZ, UK
> or Downing College, Cambridge, CB2 1DQ ,UK
> Email: [email protected]
> Tel:+44 1223 765199 Fax:+44 1223 332662
> ===========================================
>
>
>
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