To: Chris Cormeau
I was recently doing a search on the Web and ran across your photoresist
question regarding coating methods. I see that the memo was written quite
awhile ago (Feb. 1996). If you are still looking for alternative coating
methods, however, please feel free to contact me. I have worked with several
alternative methods to spin coatings, especially on deep features. The
chemistry of the photoresist solutions also makes a difference in the surface
wetting.
Best Regards,
Susan Bagen
Advanced Process Concepts
(972) 527-5028 Phone
(972) 517-7928 Fax