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MEMSnet Home: MEMS-Talk: wafer bonding tool
wafer bonding tool
1997-08-18
Alexander Holke
wafer bonding tool
Alexander Holke
1997-08-18
We want to by a wafer aligner and bonder. To our knowledge there are only
two manufacturer, i.e. Electronic Visions Inc. and Karl Suss. Could anyone
who has experience with these devices give us recommendations or point out
the preferrences / drawbacks of each.

Any tip is appreciated

Alexander Hoelke
University of Cincinnati
Center for Microelectronic Sensors and MEMS


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