Hi Yilel

PMMA doesn't dissolve in TMAH. So you do not need any protective coating
to cover it.

regards
Sreemanth

On Sat, 10 May 2003, Yilei Zhang wrote:

> Hello members:
> May anyone tell me how to protect PMMA coating during TMAH etching? Is PMMA
> soluble in TMAH? Thanks.
>
> Regards,
> Yilei Zhang
>
>
>
>
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