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MEMSnet Home: MEMS-Talk: Spin On Glass (SOG) for planarization & anodic bonding
Spin On Glass (SOG) for planarization & anodic bonding
2003-05-13
A.K.Ismail
black silicon
2003-05-13
Isaac Wing Tak Chan
2003-05-14
Jim Beall
2003-05-14
[email protected]
2003-05-14
Roger Shile
Spin On Glass (SOG) for planarization & anodic bonding
A.K.Ismail
2003-05-13
Dear All,

Does anybody know or have experience about this SOG that can be used for
planarizing surfaces (refill 1.5um depth trenches) and at the same time
compatible for anodic bonding (have sodium ions)?. Which company supply this
kind of materials? I found some companies which supply SOG for microelectronic
industry but this type of SOG are not suitable for anodic bonding.

Best rgds,
A.K.Ismail



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