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MEMSnet Home: MEMS-Talk: Can Nitride film be used as Pocl3 doping mask?
Can Nitride film be used as Pocl3 doping mask?
2003-05-13
li zhiping
Can Nitride film be used as Pocl3 doping mask?
li zhiping
2003-05-13
Hi Dear Members:
Could you tell me whether I can use 500A nitride film as a mask for POCL3
doping for several hours at 900 degree?
Bests
Zhiping

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