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MEMSnet Home: MEMS-Talk: information on langmuir probe:abhiram
information on langmuir probe:abhiram
2003-05-13
Lakshmi Abhiram
information on langmuir probe:abhiram
Lakshmi Abhiram
2003-05-13
hi all,could one of you let me know where to get the right information on
langmuir probe and its usage in dc sputtering.
this is what i am looking for...
1.the basic concept of lanmuir probe and how exactly does that work when
placed in a dc spuutering chamber.
2.the circuitry that is necessary to build the probe.

could one of you suggest me any books that cover the above mentioned
points.

thats all for now.

regards
abhiram.


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